Slope Profilometry of Grazing Incidence Optics*
نویسنده
چکیده
Profiling instruments are well-suited to the measurement of grazing incidence optics, such as those found in synchrotron radiation beam lines. Slope measuring profilers, based upon the principle of the pencil beam interferometer, have proven to be especially useful in measuring the figure and slope errors on cylindrical aspheres. The Long Trace Profiler, in various configurations, is the most widely used of this class of profiler. Current performance provides slope measurement accuracy at the microradian level and height measurements accurate to 25 nm over 1 meter trace lengths.
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